NdFeB is widely applied to the field of micro linear motor manufacturing due to its high performance, but the hard and brittle characteristics increase the difficulty of its processing and negate its application. Laser processing has great advantages in the processing of NdFeB microstructures due to its high energy density, small heat-affected zone, and high processing accuracy. In order to obtain the array microstructure on the surface of NdFeB, this paper studies the influence of parameters such as laser power, scanning speed, and scanning times on the processing quality. The results show that the length and width of the array microstructure are less affected by the processing parameters, but the processing depth is significantly positively correlated with the laser power, and negatively correlated with the scanning speed. When the laser power is 1.3 W, the scanning speed is 10 mm/s, and the scanning time is 6, the processing depth can reach 40 um, the length and width are maintained at 100 um, and the array microstructures have a good surface morphology. This research is of great significance for upgrading the processing method of the micro linear motor slider and improving the performance of the micro linear motor.
 

NdFeB, laser processing, array microstructure, micro linear motor