ZrO₂ thin films have many excellent properties and are widely used in various fields, especially in military industry. Therefore, it is of great significance to prepare higher quality ZrO₂ thin films. It is well known that ion implantation can improve or enhance the properties of thin film substrates. After Nb ion implantation into Ti-55511 alloy, the
mechanical properties and tribological properties have been significantly improved . After Zr ion implantation in pure magnesium, the corrosion resistance was significantly improved, and the nano-hardness of pure magnesium was increased by 48% when Zr ion was formed near the surface of pure magnesium. In this paper, ZrO₂ thin film is plated on silicon wafer by magnetron sputtering equipment. The film prepared by this method is more compact and uniform, and the ZrO₂ thin film with good quality is obtained, and it also has good hardness and corrosion resistance. In this study, Zr and Nb ions were co-implanted onto the surface of ZrO₂ films by ion implantation technology to further improve the mechanical and biological properties of the films. The surface properties and surface ion forms of the samples were analyzed by SEM, XPS, AFM and TEM. The hydrophilicity of the samples was analyzed by water contact Angle test, and the corrosion resistance of the samples was studied. Finally, the results show that the hydrophilicity and corrosion resistance of ZrO₂ films are improved with the increase of injection amount in a certain range, and the mechanical properties are also improved obviously.
 

Ion implantation,ZrO2 thin films,Biological properties,mechanical properties