Here we report a home-made arc deposition system, equipped with large arc sources up to Ø155 mm in diameter, which can reach a deposition rate of 3.36 μm/h for commercial production. Thick Cr/CrN multilayers of ≥42 μm in thicknesses were fabricated and characterized for mechanical properties and microstructure. The coatings are dense and uniform. Nitrogen diffusion phenomenon produced in the long deposition process observed by TEM. Abnormal Cr and CrN growth rate can be explained with nitrogen diffusion, plasma generation and transport. The hardness, friction and anti-oxidation performance could be improved by reducing Cr deposition time. Multilayer structure can improve the adhesion strength of the coating, but thinner Cr layer will also reduce the bonding force. The present work shows high potentials of thick Cr/CrN coating using such a large-source arc deposition system in areas where thick coatings are required, and demonstrates excellent service performance.

Large arc source; Thick coating; Cr/CrN multilayer; Nitrogen diffusion;